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Description: KLA Alpha Step 500 IQ Profilometer
(Alpha Step IQ Profilometer)
KLA Alpha Step 500 IQ Profilometer
Specifications:
* Scanning stylus (standard): 5- Stylus force: 15 mg (nominal setting)
* Profile length (max): 10 mm in the right direction 2 mm in the left direction
* Maximum step height: 2 mm (for stepping down conditions only)
* Scan Length: 10 mm Scan Speed: 2 μm/s to 200 μm/s
* Sampling Rate: 50, 100, 200, 500 or 1000 Hz
* Vertical Range: ± 10 μm (20 μm) at 0.012 Å vertical resolution ± 200 μm (400 μm)
at 0.24 Å vertical resolution ± 1000 μm (2000 μm) at 1.2 Å vertical resolution
* Horizontal Resolution: 0.01 μm (100 Å) at 2 μm/s scan speed
* Scan Method: Moving stylus, stationary stage
* Stylus Control: Manually adjustable force
* Range: 1.0 – 99.9 mg
* Resolution: 0.1 mg (~ 0.5mg standard deviation)
* Optical Magnification: 1) Standard: 70 – 210 x 2) High Mag. option: 160 – 480 x
* Step Height Repeatability: 1) At 20 μm range: 0.0008 μm (8 Å) typical standard
deviation1 or 0.1% of measured vertical range. 2) At 400 μm range 0.005 μm (4000 Å)
typical standard deviation or 0.2% of the measured vertical range. 3) At 2000 μm
range 0.030 μm (2 μm) typical standard deviation or 0.5% of the measured vertical range
* Z control : interactive control via software
* Maximum sample size: 158 mm diameter
* Maximum sample thickness: 21 mm
* Maximum sample weight: 1 kg
* Throat depth: 81 mm
* X/Y maximum travel: 151mm x 80 mm
* Stage rotation: 360°, unlimited manual rotation
* Leveling: manual and various software leveling of profiles
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