Surfscan 4000 Particle Counter-Tencor Surfscan 4000 wafer particle counter-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tencor	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Surfscan 4000 Particle Counter
Condition:	Used
Asking Price:	Contact Sales
Inventory Number:	53572

Description: Tencor Surfscan 4000 wafer particle counter (Surfscan 4000 Particle Counter)

Tencor 4000 Wafer Particle Counter

* Used to measure particles on bare silicon wafers.
* Particle sensitivity: 0.3um with 95% detection probability.
* Haze sensitivity: 1 PPM.
* Spatial resolution: 50 um particle spacing between defects.
* Substrate sizes 3" to 6".
* Measurement time for a 6" substrate: 30 seconds.
* Measurement modes: Automatic, Manual or One-Wafer.
* Light source: Helium-neon laser 2 mW, wavelength = 6328
* System will be fully refurbished. * Looks and runs great.

Tencor Surfscan 4000 wafer particle counter

		Specifications

Patterned / Unpatterned wafers	Unpatterned
Repeatability
Resolution	.3 microns @95% capture based on latex calibration wafers
Substrate Material	Silicon
Substrate Thickness	SEMI standard wafer thickness from 0.3 - 0.75mm
Substrate size	100, 125, 150mm
Thruput	upto 60 wafers/hour
Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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