Semitool SST C321280 Spray Solvent Tool

* Model # SSTC321280
* Cabinet: Stainless Steel, Thru-the-Wall, Class 1
* Mfg date new was 2000
* Gen-2 build
* Front local interface (standard)
* Tool side touch screen
* EMO (Front and Rear)
* Bottom fed facilities
* Top fed exhaust
* 2 Heated tanks for NMP based processing (standard)
* 2 IPA tanks (non heated)

* 280 Bowl (accommodates 8" (200mm) substrate-low profile)

* Encapsulated Ferrofluidic drive seal

* Kalrez bowl seal

* N2 purged dedicated chemical and DI water spray manifolds

* Dedicated TFE N2 dry manifold

* Graphic color controller

* Process variable control of RPM

* Heated chemical temperature 
* Serial # F8055/4937

* Power: 208VAC, 30A, 3-Phase, 5 wire 50/50 Hz

* Original price when new was appr $400,000

 

Note: The pictures were before defacilitation. The tool is now crated and located at Sitek's faciltiy in Rocklin, CA