Description: Semitool SST C621270P
(SST C621270P)
Semitool SST-C621270P Spray Solvent Tool
* Cabinet: Stainless Steel, Thru-the-Wall, Class 1 * Serial # F75567 * 4 Heated tanks * 2 IPA tanks
* 270 Bowl (accommodates 6" substrate-low profile)
* Encapsulated Ferrofluidic drive seal
* Kalrez bowl seal
* N2 purged dedicated chemical and DI water spray manifolds
* Dedicated TFE N2 dry manifold
* Graphic color controller
* Process variable control of RPM
* Heated chemical temperature
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