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Current: Catalog : Tegal 903E (Tegal 903E)


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Manufacturer: Tegal Email Us
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Mfg. Part#: Tegal 903E
Condition: Used
Asking Price: Contact Sales
Inventory Number: 52462

Description: Tegal 903E (Tegal 903E)

Tegal 903E

*Cassette To Cassette In-line Single Wafer Plasma Etcher *Capability to etch vias and contacts with anisotropic or sloped profiles
*Can handle wafers from 3¿ to 6¿
*Microprocessor control
*208 V, 50/60 Hz


Tegal 903E






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Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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