Description: Tegal 903E
(Tegal 903E)
Tegal 903E
*Cassette To Cassette In-line Single Wafer Plasma Etcher *Capability to etch vias and contacts with anisotropic or sloped profiles *Can handle wafers from 3¿ to 6¿ *Microprocessor control *208 V, 50/60 Hz
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