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Current: Catalog : MTI Flexifab Photoresist Prime, Coat and Bake System (MTI Flexifab Coater)


Product Details
Manufacturer: MTI Email Us
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Mfg. Part#: MTI Flexifab Coater
Condition: Used
Asking Price: Contact Sales
Inventory Number: 52396

Description: MTI Flexifab Photoresist Prime, Coat and Bake System (MTI Flexifab Coater)

MTI Flexifab Photoresist Prime, Coat and Bake System

* System configuration:
1ea Controller
1ea Send/Receive Module
1ea. Vacuum prime module
1ea Coater Module Developer Module (Configured with 2ea Millipore pump, top side edge bead removal and bowl rinse )
1ea. Bake Modules
* System can accommodate 3" to 8" wafers
* Modular design
* System is sold as fully refurbished
* System set up is available
* Full spare parts support is available
 
Note: We can add more (up to 4ea.) or change out any type Photoresist pumps ie IDI, cybor, Millipore, etc on this tool.

You can also see 2 Video's of MTI Flexifab's running on these these links:

http://sitekprocess.com/commerce/catalog/product.jsp?product_id=5100&czuid=1331318887126

http://sitekprocess.com/commerce/catalog/product.jsp?product_id=5101&czuid=1331319209830


 MTI Flexifab Photoresist Prime, Coat and Bake System






Specifications







Specification Url  
Bake Module  
Coat Module  
Controller  
Flexifab Demo 4-28-15 Flexifab Demo 4-28-15  
Flexifab Video Demonstration - March 2012 Flexifab Video Demonstration  
Send - Receive  
Sump and Canisters  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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