Description: IDI HVP M610 Pump
(IDI 610)
IDI Cybor HVP M610 Photoresist pumps
IDI/Cybor 610 Photoresist pumps
* IDI purchased the Cybor line of pumps
* Enhanced performance in a smaller footprint¿ The M610 now has a 17% smaller footprint with enhanced operational and programming capability. * The M610 is designed to dispense high viscosity semiconductor processing chemicals from resist to polyimides to BCB¿s as high as 50,000 cP. * The CYBOR M610 HVP combines stepper motor technology with state of the art hardware and software control technology to deliver a superior, repeatable high viscosity pump solution. * The CYBOR M610 uses patented software control technology to monitor and control the dispense operation. * me diagnostic information of the pump's operation
Important note: Per IDI , the pump can be filter up to 8,000CPS
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