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Description: IDI HVP M650 Pump
(IDI 650)
IDI Cybor HVP M650 Photoresist pumps
IDI/Cybor 650 Photoresist pumps
* IDI purchased the Cybor line of pumps
* Enhanced performance in a smaller footprint¿ The M650 now has a 17% smaller
footprint with enhanced operational and programming capability.
* The M650 is designed to dispense high viscosity semiconductor processing
chemicals from resist to polyimides to BCB¿s as high as 30,000 cP.
* The CYBOR M650 HVP combines stepper motor technology with state of the art
hardware and software control technology to deliver a superior, repeatable high
viscosity pump solution.
* The CYBOR M650 uses patented software control technology to monitor and control
the dispense operation.
* Enhancements in software allow for quick process tool interface selection. With a
simple icon selection the M650 pump auto configures the Trigger, Dispense/EOD,
Ready, Error, and Warning signals. The M650 has expanded the on board recipe
library. Now up to 8 recipes can be user selected thru discreet wiring or the
RS232/485 communications.
* What the M650 HVP can do that no other high viscosity pumps can do:
** Dramatic reduction in time to prime and purge
** Automatic setup with minimal operator intervention
** Software feedback provides real time diagnostic information of the pump's
operation
Important note: Per IDI , the pump can be filter up to 8,000CPS
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