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Current: Catalog : Nanometrics Nanospec AFT 210UV (Nanospec AFT 210UV)


Product Details
Manufacturer: Nanometrics Email Us
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Mfg. Part#: Nanospec AFT 210UV
Condition: Used
Asking Price: Contact Sales
Inventory Number: 52034

Description: Nanometrics Nanospec AFT 210UV (Nanospec AFT 210UV)

Nanometrics AFT 210UV

* Nanometrics 210UV
* Film Measurement System 
* Stage - 4" wafers - larger stage can be supplied
* Range of Thicknesses: 100 to 500,000 angstroms
* Utilizing the UV options you can measure down to appr. 10 Angstroms on certain films 
* Spot Size: 50 um with 5x objective, 25 um with 10x  
   objective, 6.5 um with 40x objective 
* Objectives: Olympus MS Plan 5, MS Plan 10, ULWD MS Plan 50 
* Optional Objectives are Olympus M5X and M100X
* Film Types: Oxide on Silicon; Nitride on Silicon; Negative 
   Resist on Silicon; Polysilicon on Oxide; Negative Resist on 
   Oxide; Nitride on Oxide; Polyimide on Silicon; Positive Resist 
   on Silicon; Positive Resist on Oxide 
* Reflectance Mode 
* Thick Films, Reproducibility: 5A ¿ 5% depending upon the 
   film type
* Typical Measurement Time: 2.5 seconds. 
* Typical Measurement Time in UV mode: 10 seconds

Nanometrics Nanospec AFT 210UV






Specifications







text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">* Range of Thicknesses: 100 to 500,000 angstroms<br><font size="2">* Utilizing the UV options you can measure down to appr. 10 Angstroms on certain films</font><span class="Apple-converted-space">&nbsp;</span></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">* Spot Size: 50 um with 5x objective, 25 um with 10x&nbsp;<span class="Apple-converted-space">&nbsp;</span></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">&nbsp;&nbsp; objective, 6.5 um with 40x objective<span class="Apple-converted-space">&nbsp;</span></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke- 
width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">* Objectives: Olympus <span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">MS Plan 5, MS Plan 10, ULWD MS Plan 50</span><span class="Apple-converted-space">&nbsp;</span></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">* Optional Objectives are Olympus M5X and M100X</span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">* Film Types: Oxide on Silicon; Nitride on Silicon; Negative<span class="Apple-converted-space">&nbsp;</span 
></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">&nbsp;&nbsp; Resist on Silicon; Polysilicon on Oxide; Negative Resist on<span class="Apple-converted-space">&nbsp;</span></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><font size="2"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">&nbsp;&nbsp; Oxide; Nitride on Oxide; Polyimide on Silicon; Positive Resist<span class="Apple-converted-space">&nbsp;</span></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">&nbsp;&nbsp; on Silicon; Positive Resist on Oxide<span clas 
s="Apple-converted-space">&nbsp;</span></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"></font><font face="arial, helvetica, sans-serif"><font size="2"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">* Reflectance Mode<span class="Apple-converted-space">&nbsp;</span></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">* Thick Films, Reproducibility: 5A ¿ 5% depending upon the<span class="Apple-converted-space">&nbsp;</span></span><br style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">&nbsp;&nbsp; film type</span><br style="fon 
t: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;"><span style="font: 14px/normal Arial, Helvetica, sans-serif; color: rgb(0, 0, 0); text-transform: none; text-indent: 0px; letter-spacing: normal; word-spacing: 0px; float: none; display: inline !important; white-space: normal; background-color: rgb(255, 255, 255); -webkit-text-stroke-width: 0px;">* Typical Measurement Time: 2.5 seconds.<span class="Apple-converted-space">&nbsp;</span></span><br>* Typical Measurement Time in UV mode: 10 seconds</font></font><br>  
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Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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