Manufacturer:	March Instruments		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	March PM-600
Condition:	Used
Asking Price:	Contact Sales
Inventory Number:	51969

Description: March PM 600 Plasma Asher (March PM-600)

March PM-600 Plasma Asher

* Fully Operational
* Large Barrel benchtop Plasma etcher/asher.
* 13.56 mzh RF power supply
* Advanced Energy RFX-600 power supply
* Up to 600 watts output power.
* 2 gas input plus N2
* Inside diameter: 10" x 12"
* 8" x 8" quartz tray to lay your wafers/substrates on.
* System does not included a faraday cage. The maximum wafer size with a faraddy cage is 5"