Description: Ultratech 602 Mask Cleaner
(Ultratech 602)
Ultratech 602 Mask /wafer Cleaner
* EQP-00854-SI * Uses high pressure DI water jets to clean particles from photomasks. * Heat lamp for drying. 120V, 60 Hz. * System can be configured for multiple mask sizes. * Currently set up for 5" square masks * Can be configures at additional charge with a contact brush scrub.
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