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Current: Catalog : MTI Flexifab Photoresist Coater (MTI-20-705020)


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Manufacturer: MTI Email Us
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Mfg. Part#: MTI-20-705020
Condition: Used
Asking Price: Contact Sales
Inventory Number: MTI-20-705020

Description: MTI Flexifab Photoresist Coater (MTI-20-705020)

MTI Flexifab Photoresist Coat Track

(4) module configuration : Send/Coat/Hot Plate/Receive 

Set up for 150mm wafers - Wafer size can be changed to process 100-200mm 

Coat module includes (2) resist dispenses.
Topside EBR, backside EBR, bowl wash.
Canisters for solvent

Hot plate max temp 250c

Sitek offers installation, field service, spare parts and phone support on all Flexifab systems.

System includes warranty.




MTI Flexifab Photoresist Coater






Specifications







Specification Url  
MTI Flexifab Coater Demo MTI Flexifab Coater Demo  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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