Yield Engineering YES 6112A-Yield YES 6112A HMDS Vapor Prime Oven-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Yield	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Yield Engineering YES 6112A
Condition:	Used
Asking Price:	Contact Sales
Inventory Number:	51603

Description: Yield YES 6112A HMDS Vapor Prime Oven (Yield Engineering YES 6112A)

Yield Engineering HMDS Vapor Prime Oven - Model 6112A

* Vacuum Bake/Vapor Prime
* Stainless construction
* Capacity: 4 cassettes of 8¿ wafers
* Throughput: 2 full loads per hour
* Temperature: 250¿C max.
* Digital microprocessor control
* Inside: 4 compartments 10¿ x 15¿ 10¿ each
* Power 120V, 50/60 Hz, 22.5A

*** No pump included ***

		Specifications

HMDS Usage	<7ml per 200 wafers
Temperature Stability	275'C +/-2'C
Throughput	appr. 2 full loads / hr
Capacity (Vapor Prime)	, 4 cassettes 8", 8 Cassettes 6", 12 Cassettes 4"
Capacity (Vapor Prime Image Reversal)	N/A
Capacity (Vapor Prime Image Reversal Silyation)	N/A
Dimensions Chamber (hwd)	20" x 20" x 15.12"
Dimensions System (hwd)	26" x 33.75" x 25"
Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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