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Current: Catalog : Yield YES 6112A HMDS Vapor Prime Oven (Yield Engineering YES 6112A)


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Manufacturer: Yield Email Us
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Mfg. Part#: Yield Engineering YES 6112A
Condition: Used
Asking Price: Contact Sales
Inventory Number: 51603

Description: Yield YES 6112A HMDS Vapor Prime Oven (Yield Engineering YES 6112A)

Yield Engineering HMDS Vapor Prime Oven - Model 6112A

* Vacuum Bake/Vapor Prime
* Stainless construction
* Capacity: 4 cassettes of 8¿ wafers
* Throughput: 2 full loads per hour
* Temperature: 250¿C max.
* Digital microprocessor control
* Inside: 4 compartments 10¿ x 15¿ 10¿ each
* Power 120V, 50/60 Hz, 22.5A

*** No pump included ***


Yield YES 6112A HMDS Vapor Prime Oven






Specifications







HMDS Usage <7ml per 200 wafers 
Temperature Stability 275'C +/-2'C 
Throughput appr. 2 full loads / hr 
Capacity (Vapor Prime) , 4 cassettes 8", 8 Cassettes 6", 12 Cassettes 4" 
Capacity (Vapor Prime Image Reversal) N/A 
Capacity (Vapor Prime Image Reversal Silyation) N/A 
Dimensions Chamber (hwd) 20" x 20" x 15.12" 
Dimensions System (hwd) 26" x 33.75" x 25" 
Specification Url  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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