Description: Kulicke & Soffa 973 Substrate cleaning system
(K & S 973 MicroWash)
Kulicke & Soffa 973 MicroWash * Handles up to 8" wafers and 10" diagonal substrates * For sawed/scribed wafers, photomask and other substrate cleaning * Touch screen operations and recipe storage * Oscillation High pressure DI spray arm - up to 2000 psi * Filtration at 0.2um * Combined chamber exhaust and drain * Built in safety interlocks * Nitrogen dry. Infrared heat lamp. * 115V, 50/60 Hz, 6A. * The K & S 973 is now owned by ADT * Bottom access door opens via a 9/32nd socket head * See attached sales brochure
NOTE: This system is comptable to a Ultra t SCSe-124. The front name plate is just turned around.
https://youtu.be/AFV4yYfm-ro
|