Manufacturer:	Tencor		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Tencor Auto OmniMap RS55 / tc
Condition:	Used
Asking Price:	Contact Sales
Inventory Number:	51155

Description: Tencor Auto OmniMap RS55 / tc (Tencor Auto OmniMap RS55 / tc)

Tencor Auto OmniMap RS55 / tc

* Serial # 960215RS55TCA
* Four Point Probe Resistivity Mapping System with Temperature
  Compensation and Wafer Handler. 
* Cassette to cassette measurement.
* Display modes include contour maps, 3-D plots and diameter scans.
* Can compensate sheet resistance measurements against ambient
   temperature and materials TCR. 
* 50mm - 200mm Wafers, <5mohms/sp to > Megohm/sp
* Measurement Range
* Typical Measurement Time: 3.5 - 4.5 Seconds per Test Site * <0.2%(1sigma) Measurement Repeatability
* Thermal Chuck Temperature Measurement Accuracy:+/-
   0.5'C
* PC based System
* X-Y Map: Up to 1200 Sites Programmable, Probe 
* Qualification: 20 sites
* 1-30 Programmable Routines Test Sites (ASTM Standard
   Tests Included)
* 115V, 50/60 Hz.