Surfscan 164 Particle Counter-Tencor Surfscan 164-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tencor	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Surfscan 164 Particle Counter
Condition:	Used
Asking Price:	Contact Sales
Inventory Number:	51118

Description: Tencor Surfscan 164 (Surfscan 164 Particle Counter)

Tencor Surfscan 164 particle counter

* Model 70-00260
* S/n 0385-521
* mfg 3/85
* COntroller 70-00210 s/n 0385-721
* 5" and 6" wafer, low profile carreir only
* Parts tool

		Specifications

Patterned / Unpatterned wafers	Unpatterned
Repeatability
Resolution	.3 microns @95% capture based on latex calibration wafers
Substrate Material	Silicon
Substrate Thickness	SEMI standard wafer thickness from 0.3 - 0.75mm
Substrate size	100, 125, 150mm
Thruput	upto 60 wafers/hour
Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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