Lam 590-LAM 590 Etcher-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	LAM	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Lam 590
Condition:	CFD
Asking Price:	Contact Sales
Inventory Number:	50864

Description: LAM 590 Etcher (Lam 590)

LAM 590 Etchers

* Fully automated microprocessor control
* High-throughput vacuum loadlocked
* Stepper motors
* Programmable, variable electrode spacing
* End point detection
* Cassette to cassette
* Can accomodate 3" to 6" wafers
* Five gas channel maximum
* RF power 1250 watts @ 13.56 MHz. 208 VAC, 3 Phase, 60 Hz.

		Specifications

Specification Url
LAM 590 Etcher
LAM 590 Etcher
LAM 590 Etcher
LAM 590 Etcher
LAM 590 Etcher

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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