490-LAM 490 Poly / Nitride etcher-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	LAM	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	490
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	50858

Description: LAM 490 Poly / Nitride etcher (490)

LAM 490 Poly /Nitride Etcher

*Fully automated microprocessor control
*High throughput vacuum load locked
*Programmable, variable electrode spacing
*Endpoint detection
*Can be configured for 3" to 6" wafers
*Bulk head mount configuration
*ENI OEM 6 13.56 MHz
*650W RF Generator. 208 V, 3 Phase, 60 Hz

		Specifications

Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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