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Description: Tencor Alpha Step 500 Profilometer
(Alpha Step 500 Profilometer)
KLA / Tencor AlphaStep 500 Profilometer
The AlphaStep¿ 500 is a state-of-the-art, stylus-based surface profiler that combines high measurement precision with versatility and economy. Ideal for applications such as materials laboratories, semiconductor pilot lines, and process research, the AlphaStep 500 offers excellent repeatability and performance to analyze and monitor processes. The tool measures the difference in thickness across a sample and may be used to measure deposition thicknesses.
* Computer controlled Scanning and data collection
* Comprehensive data analysis software
* Intuitive user interface
* Application-specific recipes easily programmed
* High resolution VGA monitor
* Zoom optics with magnification up to 210x
* Multi-scan average mode scans up to 10 times and then
averages the scan before print out
* Powerful Data Analysis w/ up to 30 standard surface
parameters selections
* Step Height Measurement Range:Maximum 10 U Step
Height Resolution 25.00 U Other 21 mm (0.82")
* Maximum Thickness: 10 mm (400 mil) Scan Length 300
um (12 mil)/25 Angstrom (1 uin)
* Vertical Resolution 1-100 mg
* Adjustable Stylus Force 70-210X
* Variable Image Magnification 10 Angstrom
* Max. Step Height Repeatability in the 13 um range
* Excellent Condition
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