YES LP-III Vapor Prime Oven- Yield YES LP-III Vapor Prime Ovens-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Yield	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	YES LP-III Vapor Prime Oven
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	50715

Description: Yield YES LP-III Vapor Prime Ovens (YES LP-III Vapor Prime Oven)

Yield Engineering LP-III Vapor Prime Oven

Microprocessor controlled -
Lark Logical Sequencer Athena Temperature Controller.
12" x 12" x 12" process chamber.
300c max temperature.
HMDS Flask included.
Temp Stability +/- 2%.

*Vacuum Pump needs to be quoted as an option
* Leybold D16 or higher pump required

		Specifications

HMDS Usage	<4ml per 200 wafers
Temperature Stability	275'C +/-2'C
Throughput	2 full loads / hr
Capacity (Vapor Prime)	8 Cassettes 4"
Capacity (Vapor Prime Image Reversal)	4 Cassettes 4"
Capacity (Vapor Prime Image Reversal Silyation)	N/A
Dimensions Chamber (hwd)	12" x 12" x 13.5"
Dimensions System (hwd)	27.5" x 23.75" x 19.5"
Specification Url
YES LP III
YES LP III
YES LP III
YES Valve Demo 7-21-16	YES Valve Demo 7-21-16

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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