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Current: Catalog : SVG 8126 PC / 8136 Coat and Track (8100 Series Coater / Developer)


Product Details
Manufacturer: SVG Email Us
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Mfg. Part#: 8100 Series Coater / Developer
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 50654

Description: SVG 8126 PC / 8136 Coat and Track (8100 Series Coater / Developer)

SVG  Track Photoresist Coater

** Update confirugration when tool arrives***
* Coat controllers:  8126 PC/ 8136 HPO
* Coat Process: Send-Coat-Bake-Bake-Receive
* Devlop Process: Send-Devlop-Chill-Receive
* Current wafer size: 3"
* System will be refurbished



SVG 8126 PC / 8136 Coat and Track






Specifications







Specification Url  
EQP-00554  
EQP-00554  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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