Description: SVG 8126 PC / 8132 Coater and Developer
(SVG 8100 series track)
SVG Dual Track Photoresist Coater and Developer
* EQP-00556 * Coat controllers: 8126 PC / 8136 HPO * Develop controllers: 8132 CTD / 8136 HPO & 8636 HPO * Dual track system. * Coat Process: Send-Coat-Bake-Receive * Develop Process: Send-Develop-Chill-Receive * Current wafer size: 3" (easily converted to 5") * System will be refurbished
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