YES LP-III M5- Yield YES LP-III-M5 Vapor Prime Ovens-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Yield	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	YES LP-III M5
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	50353

Description: Yield YES LP-III-M5 Vapor Prime Ovens (YES LP-III M5)

Yield Engineering LP-III- M5 Vapor Prime Oven

* EQP-
* YES LPIII-M5 (also known as an M5)
* Microprocessor controlled.
* 16' x 16" x 16" process chamber.
* System has split shelf in chamber
* 300c max temperature.
* Temp Stability +/- 2%.
* Vacuum Pump is not included

* Leybold D16 or higher pump required

		Specifications

HMDS Usage	<5ml per 200 wafers
Temperature Stability	275'C +/-2'C
Throughput	2 full loads / hr
Capacity (Vapor Prime Image Reversal Silyation)
Capacity (Vapor Prime Image Reversal)	4 Cassettes 6", 6 Cassettes 4"
Capacity (Vapor Prime)	8 Cassettes 6", 12 Cassettes 4"
Dimensions Chamber (hwd)	16" x 16" x 16"
Dimensions System (hwd)
Specification Url
YES LP - 5 (3-30-17) 2 of 3
YES LP - 5 (3-30-17) 3 of 3
YES LP-5 (3-30-17) 1 of 3
YES LP-III-M5	YES LP Oven -1-7-15-10.wmv
YES LP-III-M5 Oven	YES LP III-M5-7-15-10.wmv
YES LP-V Source Inspection 6-15-16	YES LP-V Source Inspection 6-15-16

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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