Tegal 965 Barrel Etcher-Tegal 965 Barrel Etcher-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tegal	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Tegal 965 Barrel Etcher
Condition:	Used
Asking Price:	Contact Sales
Inventory Number:	50314

Description: Tegal 965 Barrel Etcher (Tegal 965 Barrel Etcher)

Tegal 965 Barrel Etcher

*Batch photoresist stripper/poly/nitride etcher
*13.56 ENI-ACG-10B 1000 watt generator or Tegal 600 watt systems available
*VT-520 Monitor
*Two process gases
*Holds up to 3ea. 6" boats of wafers

		Specifications

Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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