Description: Tencor Flexus 2908
(Tencor Flexus 2908)
KLA/Tencor Flexus 2908
Wafer size: 125mm-200mm Temperatures up to 900C Dual wavelength technology MS Windows based software Power: 230v, 50/60hz
Tool primarily used for calculation of biaxial modulus of elasticity and linear expansion, water diffusion coefficient in dielectric films, linear regression and stress-temp or stress-time gradients. diffusion coefficient in dielectric films, linear regression and stress-temp or stress-time gradients.
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