|
Description: CEE 4000 Coat Bake Track
(Brewer Science / CEE 4000)
CEE/Brewer Science 4000.
Fully programmable automated coat/bake track system
* System is fully refurbished.
* Portable bench top unit.
* Multi-substrate capabilities with no retooling.
* Auto-centering and Backside rinse (BSR).
* Hot plate temperature to 400'C.
* Throughput performance is typically 30-50 substrates per hour.
* Can process wafers up to 8"/200mm.
* A wide variety of photoresist pumps can use used.
Refurbishment process included; but is not limited, to the following:
* Remove sub-assembly from the system to clean inside the machine and each of these subassemblies: indexers, spin assembly,
hot plate and chill/cool plate.
* Replace any damaged airlines, vacuum lines, wires, harnesses and/or connectors.
* Clean and or replace the drain and exhaust lines.
* Reassemble system back together. Check for worn and or damaged parts.
* Remove all PC boards. They are then cleaned, checked for defects and then reset into system.
* Upon reassembly, the following are leveled: spin assembly, hot plate and chill/cool plate.
* Test and calibrate the hot plate and chill/cool plate.
* Test (rebuild as necessary) and calibrate the spin motor. During test, replace any sensors that are faulty.
* Check (repair if necessary) all voltages on power supplies.
* Test and calibrate the wafer transfer arm.
* Tested and calibrate send and receive indexers.
* Run diagnostics in manual mode for the spin and bake modules.
* Clean entire outside of systems.
* Rebuild test and install (if purchased) the needed photoresist pump, controllers and electronics.
* System is cycled for 5 days (50 minimum runs) using a DI water and IPA mixture.
|
Privacy Policy