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Description: ADE 6034 Thickness Gauges
(ADE /Microsense 6034)
ADE / Microsense model 6034
* Measures: Wafer thickness total, Thickness variation (TTV), Flatness, bow and warp.
* Non-contact
* Accurate
* Digital display
* Wide operating range
* ASTM standard
Specifications
RANGE:
Thickness: 0-1000.0 microns, 0-40.00 mils
TTV, Warp, Bow:0-250.0 microns, 1-10.00 mils
Accuracy:+/- 2.5 microns, 0.1 mils
See "More details" below for a detailed specification sheet.
Precision: 1.3 microns, 0.05 mils (1 sigma)
Resolution: 0.1 micron, 0.01 mils
Wafer Rings Parallelism: 1.3 microns, 0.05 mils
Flatness Precision: 1.3 microns, 0.05 mils
Limits: User settable high and low with front panel LED indication of high or low out of range condition.
POWER REQUIREMENTS:
115+/- 15 VAC, 50-60 Hz Standard
230+/- 30 VAC, 100 +/- 10 VAC Optional
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