Description: MTI Multifab Photoresist Coaters
(MTI Multifab photoresist Coat)
MTI Multifab Photoresist Track
* Process configuration is Send/Coat/Receive. * Hot Plate (Bakes) can be added as an option. * Capable of handling 2" and up to 6" wafers. * System can be reconfigured for multiple processes. * Systems can be sold as operational or fully refurbished
NOTE: See below for a copy of the MTI Multifab original OEM brochure and a detailed specification with facility requirements.
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