Manufacturer:	Prometrix		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	KLA Tencor RS-55 t/c
Condition:	Used
Asking Price:	Contact Sales
Inventory Number:	52235

Description: Prometrix RS-55 t/c Resistivity Mapper (KLA Tencor RS-55 t/c)

Prometrix RS-55 t/c. Tencor RS-55 t/c

* 50mm - 200mm Wafers, <5mohms/sp to > Megohm/sp
* Measurement Range
* Typical Measurement Time: 3.5 - 4.5 Seconds per Test Site * <0.2%(1sigma) Measurement Repeatability
* Thermal Chuck Temperature Measurement Accuracy:+/-
   0.5'C
* PC based System Controller 25 Mhz 486 Based MPU
* X-Y Map: Up to 1200 Sites Programmable, Probe 
* Qualification: 20 sites
* 1-30 Programmable Routines Test Sites (ASTM Standard
   Tests Included)

System includes:
* 1 Keyboard # ML4100 SN/C004024
* 1 Mouse-trakb Model # B5XXMP SN/ ISI420007129
* 1 LCD Monitor (NEC Multisync) Model # LCD/1560NX
   SN/4YA02054YA
* 1 Computer (AST Research Inc, Bravo LC 4/33) Prometrix
   SN/ 940112RS55TC
* 1 Power conditioner (Teal Power Conditioner) Model # 66801
   Prometrix SN/ 930155/TC-03
* 1 Wafer Handler Power Supply 115 volts, SN/ 940143C2C
* 1 Printer (HP Desk jet 895 cxi) with one power adapter
   C6409-60014
* 1 Omni Map RS55 Resistivity Mapping System SN/
   940112RS55TC
* 1 Universal Buffer (Micorbuffer, Practica Peripherals)
   Prometrix PN/ 52-0277 Rev B SN/ 33705-0277
* 48W x 30D x 22H SS table (rod top and solid bottom shelf)