Surfscan 5500 Particle Counter-Tencor Surfscan 5500-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tencor	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Surfscan 5500 Particle Counter
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	50031

Description: Tencor Surfscan 5500 (Surfscan 5500 Particle Counter)

Tencor 5500 Wafer Particle Counter

* Measures surface contamination on unpatterned wafers from 100mm to 200mm diameter.
* Detects particles as small as 0.15um in diameter.
* Identifies particle locations and sizes and displays or prints info as color wafer maps, histograms and data tables.
* Automated cassette to cassette operation. Haze measurement and seven level haze map.

NOTE: You can view the process specifications for this tool by clicking the "More Details" tab below.

		Specifications

Patterned / Unpatterned wafers	Unpatterned
Repeatability	2.5% @ 1 Standard Deviation (mean count of 500 particles, 1um diameter latex spheres)
Resolution	0.20um diameter latex spheres on a polished silicon wafer with 90% detection probability.
Substrate Material	Any opaque, polished surface that scatters less than 5% of the incident light.
Substrate Thickness	SEMI standard wafer thickness from 0.3 - 0.75mm
Substrate size	100, 125, 150 and 200mm
Thruput	60 wafers per hour (200mm)
Specification Url
Process Specifications	Tencor 5500 Specifications.tif

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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