Tencor 4500-Tencor Surfscan 4500-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tencor	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Tencor 4500
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	50024

Description: Tencor Surfscan 4500 (Tencor 4500)

Tencor 4500 Wafer Contamination Monitor

* Measures surface contamination on unpatterned wafers from
50mm to 150mm diameter.
* Detects particles as small as 0.2 um in diameter.
* Identifies particle locations and sizes and displays or prints
info as color wafer maps, histograms and data tables.
* Automated cassette to cassette operation.
* Haze measurement and seven level haze map.

		Specifications

Patterned / Unpatterned wafers	Unpatterned
Repeatability	1% @ 1 Standard Deviation (mean count of 500 particles, .5um diameter latex spheres)
Resolution	0.2um diameter latex spheres
Substrate Material	Any opaque, polished surface that scatters less than 5% of the incident light.
Substrate Thickness	SEMI standard wafer thickness from 0.3 - 0.75mm
Substrate size	3" to 6"
Thruput	30 sec for 150mm diameter subtrates per load-measure-unload cycle (approx. 120 wafers/hour)
Specification Url
Tencor 4500 - Customers wafers	Tencor 4500 - Customers wafers - 3-16-12
Tencor 4500 Demo	Tencor 4500 Demo 4-16-12
Tencor 4500 Service Manual	SFS 4500 Service Manual S302082-27-1 Searchable.pdf
Tencor 4500 video 3-9-12	Tencor 4500 video 3-9-12
Process Specifications	Tencor 4500 Specification sheet.tif
Surfscan 4500 Reference Guide	Tencor Surfscan 4500 Reference Guide.tif
Tencor Surfscan 4500 Operations manual	Tencor Surfscan 4500 operations manual.pdf

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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