Surfscan 6220-Tencor Surfscan 6220-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tencor	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Surfscan 6220
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	50022

Description: Tencor Surfscan 6220 (Surfscan 6220)

Tencor 6220 Particle Counter

* Capable of 2" -8" wafers
* Non-patterned Surface Inspection System
* .09 micron defect sensitivity @ 80% capture, based on PSL Standards.
* 0.02 ppm haze sensitivity. 0.002 ppm haze resolution.
* Accuracy within 1%.
* XY coordinates.
* Refurbished to OEM specifications.

NOTE: You can view the process specifications for this tool by clicking the "More Details" tab below.

		Specifications

Patterned / Unpatterned wafers	Unpatterned
Repeatability
Resolution	0.10um diameter latex spheres on a polished silicon wafer with 90% detection probability.
Substrate Material	Any opaque, polished surface that scatters less than 5% of the incident light.
Substrate Thickness	SEMI standard wafer thickness from 0.3 - 0.75mm
Substrate size	100, 125, 150 and 200mm
Thruput	150 wafers per hour (150mm)
Specification Url
Tencor 6220 particle counter	Tencor 6220 particle counter.jpg

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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