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Description: Tencor Surfscan 6420
(Surfscan 6420)
KLA-Tencor Surfscan 6420 Unpatterned Surface Inspection System
* Capable of 2" - 8" wafers
* Low angle optics
* Non-Patterned surface Inspection System
* 0.10 micron Defect Sensitivity @ 95% capture
* 0.02 ppm Haze Sensitivity
* Accuracy within 1%
* Refurbishment process as follows: (Note Sitek follows all OEM
refurbishment procedures)
* Install New Laser
* Clean or Replace Optics and Mirrors
* Refurbish Load Arm and Lead Screw
* Refurbish Cassette Elevators and Re-Anodize Plates
* Refurbish All Wiring or Replace
* Refurbish All Switches or Replace
* Refurbish Monitor or Replace
* System refurbished to meet OEM Specification
* System is completely refurbished
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