Description: Tencor Surfscan 6200 wafer particle counter
(KLA - Tencor 6200)
Tencor Surfscan 6200 wafer particle counter
* Capable of 2" - 8" wafers. * Non-patterned surface Inspection System. 0 * .09 micron Defect Sensitivity @ 80% capture based on PSL Standards. * 0.02 ppmHaze Sensitivity. 0.002 ppmHaze Resolution. * Accuracy within 1%. XY coordinates. * New Argon Ion laser.
Note: We also have Tencor 6220's in stock
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