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Current: Catalog : Tencor Surfscan 6200 wafer particle counter (KLA - Tencor 6200)


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Manufacturer: Tencor Email Us
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Mfg. Part#: KLA - Tencor 6200
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 50021

Description: Tencor Surfscan 6200 wafer particle counter (KLA - Tencor 6200)

Tencor Surfscan 6200 wafer particle counter

* Capable of 2" - 8" wafers. 
* Non-patterned surface Inspection System. 0
* .09 micron Defect Sensitivity @ 80% capture based on PSL Standards.
* 0.02 ppmHaze Sensitivity. 0.002 ppmHaze Resolution.
* Accuracy within 1%. XY coordinates.
* New Argon Ion laser.

Note: We also have Tencor 6220's in stock



Tencor Surfscan 6200 wafer particle counter






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Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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