Manufacturer:	Gasonics		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Aura 1000
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	50011

Description: Gasonics Aura 1000 (Aura 1000)

Gasonics Aura 1000

* Fully operational Single Wafer Ashing System
* Fully Operational
* Re-Machine Re-Anodize the Chamber
* Replace the Magnetron Tube
* New Quartzware
* Replace O-Rings as needed
* Send out the Waveguide for refurbishment
* Re-Calibrate the MFC's
* Chamber is Re-Machined and Re-Anodized

Specifications:
Typical results:

* 2u-5u/min. positive photoresist
* >8u/min. negative photoresistAsh rates:
* Uniformity: <20%
* Selectivity to underlying films: > 100:1
* Throughput: Up to 90wph
* Particle control: <0.05 p/cm2 0.3u
* Damage control: <0.IV CV-shift for 250A gate oxide

* 208V, 3 phase, 60Hz 30A
*Approx. weight: 350 lbs
*Approx. size: 32" x 37" x 55"
*Wafer size can be 75 - 150mm
 
***Possible option: CE certification