Description: AG Associates RTP Systems 8108
(RTP Systems 8108)
The Heatpulse® 8108 system
- We have a fully operational RTP machine for sale: - AG Associates Heatpulse 8108 - Installed into a Class 10 clean room, and used for CMOS processing, only. - Automatic 6" wafers handling. - Gasses: N2, O2, N2O, NH3, Ar / MFC range : 20SLPM. - Pyrometer temperature control: 400C - 1200C - The machine was professionally maintained; the service company info available.
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