Description: ADE Ultra Gage 9500 Metrology Tool
(9500 Ultra Gage)
ADE UltraGage 9500
* Model: ADE 9500 Main System * Multi-tool functionality including thickness, shape stress, global and site flatness * Measures 8,700 data points in under 60 seconds * Wide range of options including wafer typing * Operations Manual for ADE 9500 System. * Fully refurbished to meet ADE specifications.
ADE 9500 UltraGage is a versatile, multifunctional tool that measures wafer thickness, shape and flatness. Using ADE?s industry standard E Gage technology, the 9500 is ideal for characterizing wafers used by mature fabrication processes. Applications include outgoing wafer quality checks at silicon wafer manufacturers, sampling incoming wafer quality at IC fabs, thin film stress measurements and shape of wafers used in thermal processes. 150mm and 200mm chucks available. Optional robot module not included.
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