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Description: Chemical Dispense System
(Megapure 2222)
Chemical Dispense System - Dual Drum
polypro construction for acids, originally used for MF319 developer
4 port polypro valve manifold box for above
Solvent Chemical Dispense Unit - dual drum
stainless steel construction for solvents, originally used for PRS1000 resist stripper.
System comes with a fire suppression system
4 port stainless steel valve manifold box for above
Solvent chemical dispense Unit - dual drum
stainless steel construction for solvents, originally used for NMP
(N-methyl-2-pyrolidone).
Comes with a fire suppression system
4 port stainless steel valve manifold box for above
1) systems were only in service for a short timeframe in the 2000/2001
period, systems have been flushed with DI water
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