Description: Semitool SPECTRUM Spray Solvent Stripper
(Semitool SPECTRUM)
Semitool Spectrum Polymer Removal System
Current condition:
1) Tool has been deinstalled from the fab and plastic wrapped in storeroom. 2) Last condition is working in production. Tool moved out as wafer product changed and this solvent process is obsolete. 3) Tool make year 2000. Commissioned in Jan 2001. Sparingly used for 3.5 years. Then deinstalled and stored. Excellent conditioned. 4) System is stored in Singapore 5) System configuration: 2ea. chambers * SS SRD chamber * SS Solvent process chamber Chemistry's used: * EKC 266 * IPA * DI Model # SP-S-200-SSC Tool Dimensions: 84 x 78 x 92 Load Size: 50 wafers WIP: SMIF I/O: Dual Load Port Wafer Diameter: 200mm Power: 415 Volts 3 phase, 5 wire, 50 hertz with neutral EERD Station SEMY - Supervisory Workstation software
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