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Description: Ultratech Stepper 1100
(1100W)
1) Date of Manufacture was December 89 and Date of Purchase was February 1990.
2) It is still production. This tool is in excellent condition.
3) The latest modified software installed in 2004.
4) Use Oblong chucks for better uniformity performance.
5) Full set of Operation & Maintenance manuals.
6) 1100 specification manual
7) 1100 reticule handbook
8) It is fitted with small cross masks for better alignment accuracy is a 1:1 projection
9) Lens is quoted in the range of 0.9 to 1.25 depending on Numerical aperture, but for production 1.25 micron
10) Currently set up for 6" wafers.
****Picture if for reference only****
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