|
Description: Tencor Surfscan 6100 wafer particle counter
(Tencor 6100 Particle Counter)
Tencor 6100 Particle counter
* Red Light Laser for Non-patterned Wafer Surface
Contamination Analysis
* The Surfscan 6100 is used to detect, count and
size defects on semiconductor wafers
* Use a Robotic transport System with Vacuum to
transport wafers from cassette to scan housing
* Laser scanning system
* Data displayed in colour coded maps, Histograms
and other graphics on video monitor
* Submicron sensitivity down to 0.16 micron particles
* Instantaneous magnified 3-D views of individual defects
* Surface Haze detection
* Capable of handling 100mm to 150mm wafers
|
Privacy Policy