Aura 2000-Gasonics Aura 2000-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Gasonics	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Aura 2000
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	4055

Description: Gasonics Aura 2000 (Aura 2000)

Gasonics Aura 2000

*8¿ Cassette to Cassette Single Wafer Etcher
*Configured for 8¿ wafers
*Downstream microwave process
*Loadlock with cool-down station for processed wafer
*Water cooled chamber and lamp assembly
*Downstream endpoint detection

		Specifications

Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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