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Description: KLA - Tencor SP1 Classic Particle Counter
(KLA - Tencor SP1 Classic)
KLA-Tencor SP1 Classic Single Cassette
Wafer Surface Analysis System for 300/200mm wafers
Dual Dark Field Collection Channels
0.079um Defect Sensitivity
0.001 ppm Haze Sensitivity
Argon Ion Laser (488nm)
Measurement Chamber with ULPA Filter and Blower Unit
Operator Interface :
MS Windows NT 4.0 OS, Ver 3.2 Software
Interactive Pointing Device, Keypad controls
TFT Flat Panel Display
Parallel Printer Port
Defect Map and Histogram with Zoom
Micro View Measurement Capability
Clear Side Panels for Wafer Environment Protection
Cassette Size recognition
Ulpa Filter and Blower Unit for Wide Handling Module for class 1
Feature X-Y Coordinates
System refurbished to meet OEM Specification and Calibrated
System is completely refurbished, calibrated and set up to run
8" wafer. System qualification can be done on site at Spec Equipment
Corp.
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