Tegal 515 Plasma stripper-Tegal 515 Plasma Etchers-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tegal	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Tegal 515 Plasma stripper
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	1024

Description: Tegal 515 Plasma Etchers (Tegal 515 Plasma stripper)

Tegal 515 Plasma stripper

*Barrel Type Plasma Asher Batch loaded
*Barrel type plasma reactor designed specifically for use as a fast stripper of photoresist for the fabrication of semiconductor wafers
*Achieves its strip rates by providing a large rate of gas conduction up to 300W of RF Energy
*Reaction Chamber: Aluminum 12¿ (30.48 cm) deep
*Manual or automatic modes

		Specifications

Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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