901E-Tegal 901E-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tegal	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	901E
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	199

Description: Tegal 901E (901E)

Tegal 901E

*Cassette to Cassette Poly/Nitride Plasma Etcher
*13.56 MHz RF Generator
*Easy to use menu driven control
*Input gases controlled by MFC, up to 4 MFC with system
*Non-friction spatula wafer transport

		Specifications

Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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