Manufacturer:	Matrix		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Matrix 403 Etcher
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	EQP-00566

Description: Matrix 403 Etcher (Matrix 403 Etcher)

Matrix 403 Etcher

* EQP-00566
* Down Stream isotropic etcher for oxide, poly or nitride films.
* Great for the "Bowl Etch"
* Capable of 4" to 6" wafers
* Cassette loading
* ENI OEM 6 13.56 MHz RF Generator
* Temperature controlled chuck
* Throught the wall model
* S/N 7116  101-0775
* 200-240 Volts 50/60Hz 1 Phase
* Wafer count 228040
* System time 946413
* Brooks Automation handler
   Model # 6100-36
   S/N F-1845
* ENI Generator
   Model # OEM-6M-11781
   S/N 4897