Manufacturer:	Fusion		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Ozone Asher 200AC
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	50950

Description: Fusion Ozone Asher 200AC (Ozone Asher 200AC)

Fusion Ozone Asher 200AC

*Ozone Asher
*Dry chemical ashing to remove photoresist from semiconductor substrates
*No RF or uWave Plasma
*Dry chemical process
*Atmoshperic pressure
*Infinite substrate selectivity
*End point detection 
*Fast ashing rates
*Low particulates
*Single wafer operation 
*Cassette to cassette wafer handling 4" to 8"
*Wafer capability
*Modular system design
*Microprocessor control
*Ozone monitoring system
*System self diagnostics
*208V., 3Ph., 60Hz.