Manufacturer:	Tencor		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Surfscan 7700
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	166

Description: Tencor Surfscan 7700 (Surfscan 7700)

Tencor Surfscan 7700 Pattern Wafer InpectionSystem

* Substrate sizes: 100mm, 125mm, 150mm & 200mm
* Patterned Wafer Inspection System.
* Can detect defects as small as 0.15 ¿m, while defects below
   0.2 ¿m can be detected on many process levels, including
   nitride, oxide, polysilicon and TEOS films.
* Capable of measuring defects on unpatterned wafers and
   measuring wafers from 4¿ to 8.¿
* High sensitivity on after-etch and high topography
   applications.
* Circular input polarization enhances sensitivity and defect
   capture on post-CMP and other post-deposited layers.