Manufacturer:	Tencor		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Surfscan 7600
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	165

Description: Tencor Surfscan 7600 (Surfscan 7600)

Tencor 7600 Partical Inspection System

* Delivers critical defect data quickly.
* A multi-thresholding capability allows a virtually unlimited
   number of data collection thresholds to be established for 
   different regions of the device.
* Substrate sizes: 100, 125, 150, 200 mm diameter wafers.
* Sensitivity: 0.15 um.
* Repeatability: Count error ;eaa than 1.5% on a standard
   deviation