Surfscan 7200-Tencor Surfscan 7200-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tencor	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	Surfscan 7200
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	164

Description: Tencor Surfscan 7200 (Surfscan 7200)

Sensitivity: 0.4 um. Substrate size: 4" to 8". Scan modes: Pattern viewing, particle viewing, and microscan viewing modes. Note: You can view the process specifications for this tool by clicking the "More Details" tab below.

		Specifications

Patterned / Unpatterned wafers	Patterned
Repeatability	Less than 3% (mean count of 500 particles, 0.5um diameter latex spheres)
Resolution	0.4um diameter latex spheres
Substrate Material
Substrate Thickness	SEMI standard wafer thickness from 0.3 - 0.75mm
Substrate size	100, 125, 150 and 200mm
Thruput	22 wafers per hour (150mm), 19 wafers per hour (200mm)
Specification Url
Process Specifications	Tencor 7200 Specifications.pdf

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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